Metron Technology Delivers World-Class PFC Abatement Technology

Metron Technology, Inc. today announced an expandedproduct line of world-class abatement technology for reducing PFC(perfluorocompound) emissions consisting of the Marathon(TM),Litmas(TM) and Trinity(TM) systems, part of the Metron EcoSys(R)family of abatement systems.(1) Marathon achieves high PFC treatmentefficiencies for etch and CVD(2) emissions, with extremely low waterflow rates. Trinity is a self-contained treatment system for etchemissions that offers low power consumption. Litmas, a non-fuel basedplasma solution for etch, provides high-efficiency PFC abatement withzero added footprint.

"Metron is the only company that can provide semiconductormanufacturers with a unique and comprehensive suite of PFC abatementtechnologies plus global fab support capability," said WernerFinsterbusch, general manager of Metron Technology. "Our EcoSys lineof abatement systems helps customers implement cost-effectivesolutions to support their environmental goals and commitments, whilehelping the industry meet the World Semiconductor Council's commitmentto globally reduce PFC emissions by the year 2010."

The Marathon system integrates combustion and wet scrubbingabatement technologies to handle high gas flows from semiconductor andflat panel display CVD manufacturing processes. With its high flowcapacity, one Marathon system can be configured to handle two processtools per abatement unit, for low cost of ownership; two Marathonsystems can be also configured to provide automatic back-up capabilityfor two process tools.

The Trinity system, installed downstream of the process vacuumpumps, uses atmospheric pressure non-combustion, chemical catalytictechnology and can handle up to four etch chambers simultaneously.

The Litmas system, installed in the fore-line between a processchamber and a vacuum pump, employs a low-pressure plasma technology toachieve excellent PFC abatement efficiency. With its low operatingcost and no added footprint, it offers an efficient retrofit solutionto treat PFC emissions from existing etch tools.

The Marathon system will be exhibited at the Semicon China 2006trade show in Shanghai on March 21-23, 2006 in the Metron Technologybooth 3343, Hall W3.

Metron Technology, Inc., a wholly-owned subsidiary of AppliedMaterials, Inc. (Nasdaq:AMAT), is an independent supplier of fab-widesupport services to the semiconductor and related industries providingcustom integrated solutions for optimizing operations and improvingmanufacturing efficiency. Metron is headquartered in San Jose,California, and is on the web at www.metrontech.com andwww.emetron.com

(1) The Trinity and Litmas systems are made by Guild Associates,Inc. and Advanced Energy, Inc., respectively, for worldwidedistribution by Metron Technology.

(2) chemical vapor deposition