Rudolph's Next-Generation PrecisionWoRx VX4 Extends the Capabilities of Leading Probe Card Test and Analysis Tool

Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software for both front-end and back-end inspection and metrology solutions, today announced the PrecisionWoRx™ VX4, the next generation of its market-leading probe card test and analysis tools. The new system, which will replace the PrecisionPoint™ VX3, adds configurable channels, higher loading forces, a user interface and software architecture consistent with other WoRx family tools, and a current generation operating system (Windows® XP or Vista®). Rudolph plans to release the new VX4 in the first half of 2009. The new capabilities are designed to allow the VX4 to maintain and extend the dominant market position established by its predecessors. Configurable channels, which may be programmed for I/O and utility functions, add flexibility and convenience. Higher load forces, up to 150 kg, will accommodate newer probe cards with high pin counts. The new user interface, as suggested by the slightly modified PrecisionWoRx moniker, is consistent with other Rudolph products in the WoRx family (ProbeWoRx® and WaferWoRx®), simplifying inter-operability and data exchange. Provision of a current generation Windows XP or Vista operating system running on a multi core processor improves the tool’s speed, reliability and security. "We are excited about the launch of the VX4 and the new capabilities it will bring to the test floor,” said Darren James, Rudolph’s Probe Card Test and Analysis Division product manager. "I believe Rudolph’s ability to quickly and efficiently integrate the probe card operations as well as its strong commitment to continually invest in next-generation technologies, are key to maintaining our #1 leadership position in this growing market.” With an installed base numbered in the hundreds, the VX platform has become the industry standard for testing, analyzing and reworking probe cards. Its advanced capabilities allow semiconductor manufacturers to evaluate and correct the planarity, alignment, contact resistance, leakage current, probe force, tip wear, scrub characteristics and numerous other critical probe card parameters that impact probing process performance. Information provided by the new PrecisionWoRx tool can help test floor managers and test engineers reduce yield losses in the probing process and extend the lifetime of expensive probe cards. Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph’s strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at www.rudolphtech.com. Safe Harbor Statement This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act”). In some cases, you can identify those so-called "forward-looking statements” by words such as "may,” "will,” "would,” "should,” "expects,” "plans,” "anticipates,” "believes,” "feels,” "estimates,” "predicts,” "potential,” or "continue,” or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph’s business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph’s Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC”), which are available at http://www.sec.gov, the SEC’s website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.