Axcelis Unveils Optima Single Wafer Ion Implantation Platform; Complet

    Business Editors/High-Tech Editors

    BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 16, 2005--Axcelis Technologies, Inc. (NASDAQ: ACLS) today introduced the Optima family of single wafer ion implantation tools, a comprehensive platform that covers all applications for the 65nm technology node and beyond. The first tool in the series, the Optima MD, has already won acceptance at both leading logic and memory manufacturers. Axcelis will unveil the platform during a live Webcast at 1:00 p.m. EST today.
    The Optima MD's initial successes reflect a fundamental shift occurring in the ion implantation market. Low energy, high and medium dose implant applications can no longer be neatly grouped into the traditional industry segments. As device feature sizes scale below 65nm, implant energies scale to a lower range, resulting in longer, less productive implants. This shift to lower energies, as well as higher doses, for advanced HALO applications was a key driver behind the development of the Optima MD. This new product provides the highest productivity for the mid-dose implants, at the lowest energy ranges, with the most superior process performance.
    "In contrast to the patchwork applications coverage of other single wafer implanter products currently on the market, the Optima MD represents the first tool in a comprehensive platform that answers the industry's implant challenges at 65nm and below," said Mike Luttati, Axcelis' chief operating officer. "In developing the platform, we leveraged our close working relationships with customers to garner insight into their critical implant application needs. The results speak for themselves - the platform is already gaining traction with key device manufacturers."
    Axcelis will begin shipping the first Optima MD systems to device makers next month. The tool offers exceptional implant precision and productivity for a wide array of low energy, mid-dose implant applications, especially high-tilt HALO processes. With a broad energy range of 500eV to 750keV, the system also enables customers to cover evolving well and channel implants while still achieving high levels of productivity for more traditional implant applications.
    Axcelis designed the entire Optima platform as a simple, cost-effective approach to implantation needs in and beyond the 65nm technology node. Capable of addressing the entire range of implant energies, the platform encompasses three systems: the Optima MD for low energy, mid-dose implant applications, as well as two additional systems for high-dose and high-energy applications. This platform, which joins Axcelis' market leading multi-wafer Paradigm and Ultra implant systems, positions Axcelis as the only supplier able to provide customers with a total solution for their implant needs.

    Webcast Details

    Axcelis will host a Webcast on February 16, 2005 at 1:00 p.m. EST to discuss the Optima platform introduction. The live presentation will be accessible through Axcelis' home page at www.axcelis.com. Prior to the start of the Webcast, please access the presentation feed by clicking on "Investors" and "Events" and click on the appropriate icon.
    For audio only and to participate in the Q&A, dial 1-800-967-7135 (1-719-457-2626 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies and the conference leader: James Kawski. A telephone replay will be available from 8:00 p.m. EST on February 16, 2005 until 11:59 p.m. EST on February 23, 2005. Dial 1-888-203-1112 (1-719-457-0820 outside North America), and enter conference ID code #6444767. A Webcast replay will be available from 8:00 p.m. EST on February 16, 2005 until 5:00 p.m. EST on March 16, 2005.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

    Forward-Looking Statements

    This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

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CONTACT: Axcelis Technologies, Inc. Company Contact: David Snyder, +1 978-787-4273 david.snyder@axcelis.com or Axcelis Technologies, Inc. Investor Contact: James Kawski, +1 978-787-4000 investor.relations@axcelis.com or Loomis Group Agency Contact: Stacy Grisinger, +1 617-638-0022 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS INDUSTRY KEYWORD: HARDWARE PRODUCT SOURCE: Axcelis Technologies, Inc.

Copyright Business Wire 2005