Axcelis to Present at Goldman Sachs Technology Investment Symposium 20

    Business Editors
    Goldman Sachs Technology Investment Symposium 2005

    BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 18, 2005--Axcelis Technologies, Inc. (NASDAQ: ACLS) is pleased to announce that Mary Puma, president and CEO, and James Kawski, director of investor relations and corporate development, will be presenting at the Goldman Sachs Technology Investment Symposium 2005. This year's conference will be held February 23-25, 2005, at the Arizona Biltmore Resort & Spa in Phoenix, AZ.
    Puma and Kawski will present on Wednesday, February 23 at 4:10 pm MT. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Axcelis Technologies, Inc. Company Contact: Maureen Hart, 978-787-4266 Fax: 978-787-4275 maureen.hart@axcelis.com Investor Contact: James Kawski, 978-787-4000 Fax: 978-787-9133 investor.relations@axcelis.com or Agency Contact: Loomis Group Stacy Grisinger, 617-638-0022 Fax: 617-638-0033 grisingers@loomisgroup.com

KEYWORD: ARIZONA MASSACHUSETTS TRACK INDUSTRY KEYWORD: HARDWARE SOFTWARE NETWORKING TRADESHOW CONFERENCE CALLS SOURCE: Axcelis Technologies, Inc.

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