Axcelis to Present at D.A. Davidson & Co. Silicon Technology Conferenc

    Business Editors/High-Tech Editors
    D.A. Davidson & Co. Silicon Technology Conference 2005

    BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 28, 2005--Axcelis Technologies, Inc. (NASDAQ: ACLS) is pleased to announce that Donald Palette, vice president and controller, and James Kawski, director of investor relations and corporate development, will be presenting at the D.A. Davidson & Co. Silicon Technology Conference 2005. This year's conference will be held March 3-4, 2005, at the Grand Summit Resort Hotel and Conference Center in Park City, Utah.
    Palette and Kawski will present on Friday, March 4 at 11:30-12:20 MT. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Company Contact: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 maureen.hart@axcelis.com or Investor Contact: Axcelis Technologies, Inc. James Kawski, 978-787-4000 investor.relations@axcelis.com or Agency Contact: Loomis Group Stacy Grisinger, 617-638-0022 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS TRACK INDUSTRY KEYWORD: HARDWARE TRADESHOW CONFERENCE CALLS SOURCE: Axcelis Technologies, Inc.

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