Axcelis Announces Timing of Fourth Quarter and Year End 2004 Conferenc

    Business Editors/High-Tech Editors

    BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 19, 2005--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Thursday, February 3, 2005, beginning at 5:00 pm EST. The purpose of the call is to discuss fourth quarter and year-end results for 2004 and to provide guidance for the first quarter of 2005.
    The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-475-3716 (1-719-457-2728 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: James Kawski, and pass code: Axcelis Q4. A telephone replay will be available from 8:00 pm EST on February 3, 2005 until 11.59 pm EST on February 10, 2005. Dial 1-888-203-1112 (1-719-457-0820 outside North America), and enter conference ID code #938183. A webcast replay will be available from 8:00 pm EST on February 3, 2005 until 5:00 pm EST March 3, 2005.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Company Contact: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 maureen.hart@axcelis.com or Investor Contact: Axcelis Technologies, Inc. James Kawski, 978-787-4000 investor.relations@axcelis.com or Agency Contact: The Loomis Group Stacy Grisinger, 617-638 0022 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS INDUSTRY KEYWORD: HARDWARE COMPUTERS/ELECTRONICS BANKING MANUFACTURING EARNINGS CONFERENCE CALLS SOURCE: Axcelis Technologies, Inc.

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